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AMAT 0200-09432
Product Name: Plasma Tube Applicator, PRSP3, 25mm
Product Description: A precision-fabricated quartz plasma tube assembly designed to generate and contain remote plasma for in-situ chamber cleaning and pre-treatment processes.
Technical Specifications:
- Material: High-purity fused quartz
Detailed content
- Diameter: 25mm nominal
- Length: Custom matched to remote plasma source
- Wall Thickness: Uniform 2mm for consistent plasma coupling
Functional Features:
- Efficiently couples RF energy to generate high-density remote plasma.
- Resists erosion from fluorine-based cleaning gases (NF₃, SF₆).
- Transparent to UV radiation, enhancing radical generation efficiency.
- Seamless construction prevents leaks and ensures vacuum integrity.
Application Scenarios: Remote plasma clean (RPC) systems for chamber conditioning in PVD and CVD platforms.
