Digital guide
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AMAT 0050-07527
Product Name: Ultra-High Purity (UHP) Gas Filter Assembly
Product Description: A compact, high-efficiency gas purification filter designed to remove particulates and contaminants from ultra-high purity process gases in semiconductor gas delivery lines.
Technical Specifications:
- Filter Type: Multi-stage sintered metal media filter
Detailed content
- Pore Size: 0.003μm (3nm) absolute filtration rating
- Material: 316L VIM/VAR stainless steel, electropolished
- Pressure Rating: Maximum operating pressure 250 PSIG
- Connection: 1/4″ VCR face-seal fittings
Functional Features:
- Removes sub-micron particles to prevent wafer defects and process contamination.
- Low pressure drop design ensures efficient gas flow.
- All-welded, leak-tight construction for UHP and corrosive gas service.
- Pre-baked and double-bagged in Class 1 cleanroom for immediate installation.
Application Scenarios: Gas line filtration for specialty gases (SiH₄, NH₃, WF₆, N₂, Ar) in semiconductor process tool gas panels.
