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AMAT 0190-09488

  • Product Name: High-Purity Gas Filter Assembly
  • Product Description: A point-of-use gas filter designed to remove sub-micron particulates from high-purity process gases to maintain wafer cleanliness.
  • Technical Specifications:
    • Filtration Rating: High-efficiency 0.003 μm (3 nm) absolute rating.

AMAT 0190-23424

  • Product Name: Yamatake LOG-1117 Digital Temperature Controller
  • Product Description: A high-precision, digital PID temperature controller (OEM by Yamatake/Azbil) for closed-loop control of heater elements.
  • Technical Specifications:
    • Input: Accepts various thermocouple types (J, K, T, E, R, S, B) and RTD (Pt100).

AMAT 0110-09245

  • Product Name: 2-Phase Stepper Motor Driver Interface PCB
  • Product Description: A dedicated interface PCB that facilitates the control and drive signals between the system controller and two-phase stepper motors used for precision motion.
  • Technical Specifications:
    • Compatibility: Drives standard 2-phase bipolar stepper motors.

AMAT 5400-D-0025

  • Product Name: Precision Solid-State Relay Module
  • Product Description: An industrial-grade, DC-controlled solid-state relay (SSR) designed for reliable, low-voltage switching of high-current loads in the equipment's control system.
  • Technical Specifications:
    • Input Control: 3-32V DC (logic level compatible).

AMAT 022-27837

  • Product Name: Ceramic Chamber Liner Insert
  • Product Description: A high-purity, machined ceramic component that lines the interior of a semiconductor process chamber, protecting the chamber walls and maintaining process purity.
  • Technical Specifications:
    • Material: High-density, high-purity alumina (Al2O3, > 99.8%).

AMAT 0190-76190

  • Product Name: Advanced RF Match Network Module
  • Product Description: An automatic radio frequency (RF) impedance matching network designed to optimize power transfer from the RF generator to the plasma load in a process chamber.
  • Technical Specifications:
    • Frequency Range: 13.56 MHz (standard for semiconductor plasma processes).

AMAT 0190-00312

  • Product Name: High-Precision Pressure Transducer
  • Product Description: An absolute capacitance manometer for high-accuracy measurement of gas pressure in high and ultra-high vacuum (UHV) systems.
  • Technical Specifications:
    • Measurement Range: 1 Torr full scale, with high accuracy spanning 10-3 Torr to 1 Torr.

AMAT 0100-90978

  • Product Name: System Interface PCB Module
  • Product Description: A Printed Circuit Board (PCB) that serves as a critical communication and control interface between the main system controller and peripheral vacuum chamber components.
  • Technical Specifications:
    • Form Factor: Industry-standard VME 6U card for rack mounting.

AMAT 0051-11789

  • Product Name: Precision Flow Control Valve Assembly
  • Product Description: A high-precision pneumatic control valve designed for ultra-clean gas delivery systems in semiconductor manufacturing. It provides accurate and stable regulation of process gas flow rates within vacuum and low-pressure environments.
  • Technical Specifications:
    • Material: Body constructed from 316L electropolished stainless steel; seals made from perfluoroelastomer (FFKM) for extreme chemical resistance.

AMAT FC-0010-0047

Product Name: Thermal Mass Flow Controller
Product Description: A high‑precision thermal‑based mass flow controller designed to measure and regulate the flow rate of process gases with exceptional stability and repeatability in semiconductor manufacturing.
Technical Specifications:
  • Sensing Principle: Thermal mass flow detection

AMAT 0190-35521

Product Name: RF Match Network Variable Capacitor Assembly
Product Description: A high‑power vacuum variable capacitor used within RF impedance matching networks to adjust capacitance dynamically and maintain optimal power transfer to plasma loads.
Technical Specifications:
  • Capacitance Range: 10–500 pF

AMAT 3400-01109

Product Name: Male VCR Pipe Plug Fitting
Product Description: A high‑purity metal plug used to seal unused ports in gas lines, manifolds, and chamber fittings, maintaining vacuum integrity and cleanliness in ultra‑high purity gas systems.
Technical Specifications:
  • Material: 316L electropolished stainless steel