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AMAT 0040-87019

Product Name: Chamber Body Assembly
Product Description: A main chamber body component for 200mm semiconductor processing systems, providing the primary vacuum enclosure for wafer fabrication processes.
Technical Specifications:
  • Material: 304L stainless steel

AMAT 0020-63120

Product Name: Precision Machined Chamber Component
Product Description: A high-precision machined component for semiconductor vacuum chambers, manufactured to exacting tolerances for reliable performance in advanced wafer processing applications.
Technical Specifications:
  • Material: 6061-T6 aluminum alloy

AMAT 03-00299-00

Product Name: Inductor Assembly
Product Description: A high-performance RF inductor assembly designed for use in semiconductor plasma power delivery systems. It provides precise inductance values for impedance matching in RF power circuits.
Technical Specifications:
  • Inductance Value: 1.2 μH ±5%

AMAT 0021-84015

Product Name: Thermal Management Component Assembly
Product Description: A specialized thermal management component designed for precise temperature control in advanced semiconductor manufacturing processes. It efficiently transfers heat while maintaining electrical isolation and vacuum compatibility.
Technical Specifications:
  • Material: Composite ceramic-metal construction

AMAT 0020-20479

Product Description: A high-performance ceramic isolator component used in semiconductor processing equipment to provide electrical isolation between different chamber sections while maintaining mechanical stability and vacuum integrity.
Technical Specifications:
  • Material: Machinable aluminum nitride (AlN) ceramic

AMAT 0020-24100

Product Description: A precision-engineered ceramic insulator assembly with integrated antenna, specifically designed for semiconductor plasma processing applications. It provides electrical isolation while enabling efficient RF energy coupling into process chambers.
Technical Specifications:
  • Material: High-purity alumina ceramic (99.8%)

AMAT 0015-20150

Product Description: A high-performance electrical feedthrough assembly designed for vacuum chamber applications in semiconductor manufacturing equipment. It provides reliable electrical signal and power transmission while maintaining ultra-high vacuum integrity.
Technical Specifications:
  • Material: High-purity ceramic insulators with 316L stainless steel housing

HIMA F2301 Fail-Safe AND Gate Module

Product Introduction: A SIL 3-certified logic module implementing fail-safe AND gate functions for HIMA safety systems, ensuring safe operation only when all input conditions are satisfied.
Technical Specifications:
  • Safety Certification: SIL 3 (IEC 61508)

HIMA F5109B Safety Memory Module

Product Introduction: A high-reliability memory module for HIMA safety controllers, providing non-volatile storage for safety logic programs, configuration data, and event logs in safety-critical applications.
Technical Specifications:
  • Compatibility: HIMA F4100/F5100/F7100 series safety controllers

HIMA F7113 Safety Analog Output Module

Product Introduction: A SIL 3-certified analog output module for HIMA safety systems, providing precise and fail-safe control of 4–20mA signals to field actuators in safety-critical applications.
Technical Specifications:
  • Safety Certification: SIL 3 (IEC 61508/61511)

HIMA F4107 Safety Control Module

Product Introduction: A SIL 3-certified control module for HIMA safety systems, providing centralized safety logic execution and I/O management for medium-scale safety-critical applications.
Technical Specifications:
  • Safety Certification: SIL 3 (IEC 61508/61511), PL e (EN ISO 13849-1)

HIMA F9407 Safety Analog Input Module

Product Introduction: A SIL 3-certified analog input module for HIMA safety systems, designed for high-precision acquisition of 4–20mA and 0–10V analog signals from field transmitters in safety-critical applications.
Technical Specifications:
  • Safety Certification: SIL 3 (IEC 61508/61511)