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AMAT 0225-33921

Product Name: Precision Mass Flow Controller (MFC) Assembly
Product Description: A high-precision instrument used to measure and control the volumetric flow rate of process gases with extreme accuracy in semiconductor deposition and etch processes.
Technical Specifications:
  • Technology: Thermal mass flow sensing.

AMAT 3300-05358

Product Name: High-Purity Union Tube Fitting
Product Description: A precision-machined metal fitting used to connect two sections of process gas tubing in ultra-high purity (UHP) gas delivery systems.
Technical Specifications:
  • Material: 316L Stainless Steel, electropolished (EP) internally.

AMAT 0150-07099

Product Name: Equipment Grounding Strap Cable Assembly
Product Description: A heavy-duty, low-resistance electrical grounding cable designed to ensure reliable equipment grounding and electrostatic discharge (ESD) protection in high-voltage semiconductor process chambers.
Technical Specifications:
  • Conductor: Ultra-pure, high-conductivity braided copper.

AMAT 0150-16078

Product Name: RF Generator Control Cable Assembly
Product Description: A specialized cable that carries analog and digital control signals between the main system controller and the RF power generator, ensuring stable plasma ignition and operation.
Technical Specifications:
  • Type: Low-capacitance, double-shielded coaxial & multi-conductor composite cable.

AMAT 0150-35002

Product Name: Motor Control Cable Assembly
Product Description: A high-performance cable assembly designed for transmitting control signals and power to precision stepper/servo motors in robotic wafer transfer systems.
Technical Specifications:
  • Conductors: Multi-strand tinned copper with high-temperature insulation.

AMAT 0100-02805

Product Name: Wafer Orienter Control PCB Assembly
Product Description: A dedicated printed circuit board designed to control the wafer orientation mechanism, ensuring precise alignment of silicon wafers prior to processing in semiconductor fabrication tools.
Technical Specifications:
  • Architecture: High-density multi-layer PCB with embedded microcontroller.

AMAT 0190-09378

Product Name: RF Match Network Assembly
Product Description: An automatic impedance matching network that efficiently couples RF power from the generator to the plasma load, ensuring maximum power transfer.
Technical Specifications:
  • Frequency: 13.56 MHz (standard), with options for 27.12 MHz or 400 kHz.

AMAT 0021-14344

Product Name: Chamber Shield / Focus Ring Assembly
Product Description: A consumable metallic or ceramic shield that focuses the plasma onto the wafer and protects the chamber walls from excessive deposition or sputtering.
Technical Specifications:
  • Material: High-purity Aluminum, Copper, or Stainless Steel (depending on process).

AMAT 0010-35350

Product Name: Main Control PCB Assembly
Product Description: A sophisticated printed circuit board that functions as the core control module for managing chamber I/O, motor drives, sensors, and process sequencing.
Technical Specifications:
  • Architecture: High-density, multi-layer PCB with surface-mount technology (SMT).

AMAT 0010-09105

Product Name: Pedestal / Electrostatic Chuck (ESC) Assembly
Product Description: A multi-functional assembly that supports, clamps (via electrostatic force), and precisely controls the temperature of the wafer during processing.
Technical Specifications:
  • Type: Dual-zone or single-zone electrostatic chuck (ESC).

AMAT 0010-02991

Product Name: Robot Blade Assembly (End Effector)
Product Description: A precision, lightweight robotic arm blade used for contactless handling of silicon wafers in semiconductor wafer processing systems.
Technical Specifications:
  • Material: Advanced ceramic (Al₂O₃/SiC) or carbon fiber composite for high strength-to-weight ratio.

AMAT 0040-42746

Product Name: Gas Distribution Plate (Showerhead)
Product Description: A critical component for uniformly distributing process gases across the wafer surface in chemical vapor deposition (CVD) and etch processes.
Technical Specifications:
  • Material: High-purity Aluminum, Silicon Carbide (SiC), or coated metal.