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AMAT DIP-510-002

  • Product Name: Display Interface Panel, Operator Control
  • Product Description: Human-machine interface panel for local equipment operation, parameter display, and system status monitoring.
  • Technical Specifications:
    • Display Type: 5.7" monochrome LCD with backlight

AMAT 0226-45365

  • Product Name: Thermocouple Scanner, DPS3100 Series
  • Product Description: Multi-channel temperature scanning module for thermocouple signal conditioning and monitoring in semiconductor process equipment.
  • Technical Specifications:
    • Input Channels: 8 differential thermocouple inputs

AMAT 0200-09716

  • Product Name: Lift Pin, Heater, WxZ
  • Product Description: Specialized heater lift pin for wafer support with integrated thermal management in CVD process chambers.
  • Technical Specifications:
    • Material: High-purity ceramic composite

AMAT 0100-00010

  • Product Name: PCB Assembly, Ion Gauge Control
  • Product Description: Printed circuit board assembly for controlling and interfacing hot cathode ion gauges in high-vacuum semiconductor systems.
  • Technical Specifications:
    • Input Voltage: 24V DC ± 10%

AMAT 0050-86831

  • Product Name: Sensor Assembly, Pressure Transducer
  • Product Description: High-precision pressure measurement assembly for vacuum and process pressure monitoring in semiconductor manufacturing equipment.
  • Technical Specifications:
    • Sensor Type: Piezoresistive silicon absolute pressure sensor

AMAT 0040-97734

  • Product Name: Electrostatic Chuck (ESC), Ceramic
  • Product Description: Advanced ceramic electrostatic chuck for wafer clamping and temperature control in plasma etch and deposition processes.
  • Technical Specifications:
    • Material: High-purity aluminum nitride (AlN) ceramic

AMAT 0200-10284

  • Product Name: Lift Pin, Ceramic
  • Product Description: High-purity ceramic lift pin designed for wafer support and positioning in high-temperature semiconductor process chambers.
  • Technical Specifications:
    • Material: High-purity alumina ceramic (Al₂O₃, 99.8% purity)

AMAT 0020-31638

  • Product Name: Insulator, DC Bias, Ceramic
  • Product Description: Advanced high-performance ceramic insulator for DC bias applications in high-power semiconductor process chambers.
  • Technical Specifications:
    • Material: High-purity alumina-zirconia composite ceramic

AMAT 0020-27383

  • Product Name: Ring, Focus, Silicon
  • Product Description: High-purity single-crystal silicon focus ring for plasma confinement and uniform processing in semiconductor etch applications.
  • Technical Specifications:
    • Material: N-type single-crystal silicon (100 orientation)

AMAT 0040-62413

  • Product Name: Liner, Lower Chamber, Silicon Carbide (SiC)
  • Product Description: High-performance silicon carbide liner for lower chamber regions requiring extreme wear and chemical resistance in semiconductor processing.
  • Technical Specifications:
    • Material: Sintered alpha-phase silicon carbide (SiC)

AMAT 0200-09244

  • Product Name: Shaft, Pedestal Lift, Ceramic Coated
  • Product Description: Precision linear drive shaft for wafer pedestal elevation systems, featuring advanced ceramic coating for wear resistance in vacuum environments.
  • Technical Specifications:
    • Base Material: 17-4PH stainless steel (H900 condition)

AMAT 0020-79705

  • Product Name: Shield, Upper Chamber, Quartz
  • Product Description: High-purity quartz protective shield for upper chamber regions in plasma-based semiconductor processing equipment.
  • Technical Specifications:
    • Material: High-purity fused silica (quartz) with <1ppm metallic impurities