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AMAT 0040-45062

Product Name: Chamber Liner with Integrated Gas Channel
Product Description: A precision‑formed chamber liner designed for semiconductor process chambers, featuring built‑in gas channels to deliver process gases evenly while protecting the chamber body from plasma and deposition byproducts.
Technical Specifications:
  • Material: High-purity aluminum alloy with ceramic plasma-resistant coating

AMAT 5000-158

Product Name: High-Performance Relay Module
Product Description: A industrial-grade signal and power control relay module used in semiconductor equipment control systems to switch loads, isolate circuits and execute safety interlock logic reliably.
Technical Specifications:
  • Contact Rating: 5A at 250V AC / 30V DC

AMAT 0050-09387

Product Name: Gas Injection Nozzle Assembly
Product Description: A precision flow control component used to inject process gases into reaction chambers in a controlled and uniform manner, ensuring stable gas distribution and consistent process results.
Technical Specifications:
  • Material: 316L stainless steel or high-purity quartz

AMAT 0020-22479

Product Name: Plasma Chamber Shield Assembly
Product Description: A consumable metal shield assembly installed inside process chambers to capture sputtered particles, confine plasma and protect the main chamber body from direct plasma erosion and deposition accumulation.
Technical Specifications:
  • Material: High-purity aluminum or titanium alloy with anti-sputtering coating

AMAT 0050-40478

Product Name: Vacuum Chamber Feedthrough Assembly
Product Description: A hermetic sealing component that transmits electrical signals, power or gas media from the atmospheric external environment into the ultra-high vacuum interior of process chambers without breaking vacuum integrity.
Technical Specifications:
  • Housing Material: 316L stainless steel

AMAT 0040-39551

Product Description: A high-performance electrical insulation ring surrounding electrostatic chucks (ESC), providing electrical isolation, thermal management and physical protection for wafer support assemblies in vacuum process chambers.
Technical Specifications:
  • Material: High-performance ceramic or modified engineering polymer

AMAT 0050-86911

Product Name: Chamber Optical Viewport Assembly

Product Description: A vacuum-compatible optical viewing assembly installed on semiconductor process chambers, allowing real-time process monitoring, plasma detection and endpoint measurement while maintaining chamber vacuum integrity.
Technical Specifications:
  • Window Material: High-purity fused quartz or sapphire

AMAT MA-14639

Product Name: Precision Diaphragm Pressure Regulator
Product Description: A high-precision single-stage pressure regulator dedicated to ultra-high purity gas systems, delivering stable output pressure with high accuracy and low hysteresis for semiconductor process gas control.
Technical Specifications:
  • Inlet Pressure Range: 0–2500 PSI

AMAT 3300-04819

Product Name: High-Purity VCR Union Fitting
Product Description: A face-seal metal union fitting designed for ultra-high purity gas delivery systems, providing a hermetic and repeatable seal for connecting precision gas pipelines in semiconductor processing tools.
Technical Specifications:
  • Material: 316L stainless steel with electropolished internal surface

AMAT 0200-10368

Product Name: Ceramic Cover Ring Assembly
Product Description: A precision-machined high-performance ceramic ring used around wafer pedestals to control plasma distribution, protect wafer edges and maintain process uniformity during semiconductor etching and deposition procedures.
Technical Specifications:
  • Material: High-purity alumina ceramic (Al₂O₃) or yttria-stabilized zirconia (YSZ)

AMAT 0200-10415

Product Name: Quartz Etch Chamber Liner

Product Description: A high-purity fused quartz liner manufactured for semiconductor etching chambers, providing a chemically inert and thermally stable interior chamber surface to isolate process plasmas from the chamber body and maintain ultra-clean processing conditions.
Technical Specifications:
  • Material: High-purity synthetic fused silica (SiO₂), purity ≥99.99%

AMAT 0010-09062

Product Name: Serial Communication & I/O Controller PCB

Product Description: A printed circuit board assembly that manages serial communication protocols and provides I/O control for interfacing the main tool controller with various peripheral modules and sensors.
Technical Specifications:
  • Processor: 32-bit embedded microcontroller