Product Description: This part number refers to a specific variation of the Gasonics maintenance kit, focusing on Filtration and Abatement components. The "A" suffix often denotes a revised or upgraded version of the standard filter set. It typically includes Scrubber Cartridges and Exhaust Filters designed to neutralize hazardous byproducts from plasma and wet processes. Technical Specifications:
Product Description: This part number combination identifies a specific Preventive Maintenance (PM) Kit for Gasonics wet bench or strip tools. The "95-0503" serves as the base kit identifier, while "95-3014" specifies a sub-component, likely a set of Vacuum Pump Cartridges or Specific Seal Kits. These kits are essential for maintaining tool performance and uptime. Technical Specifications:
Product Description: The Gasonics AWD-D-3-6-002 is a Dual-Chamber Decoupled Plasma Strip System configured for specific process requirements, likely indicating a 3-slot load lock and a 6-gas line configuration. It is a robust tool designed for production environments requiring high uniformity and repeatability in photoresist removal and surface cleaning. Technical Specifications:
Product Description: This model represents an advanced configuration of the Gasonics AWD-D series, specifically a High-Throughput Decoupled Plasma Strip System. The "3-7" designation often implies a 3-chamber configuration or a specific generation tailored for 300mm (12-inch) wafer compatibility, while "005" denotes a specific hardware revision with enhanced capabilities. It is designed for the most demanding production environments. Technical Specifications:
Product Description: The Gasonics 95-3155 is identified as an RF Impedance Match Network or a Tuner Circuit for plasma generation systems. This component is essential for maximizing power transfer from the RF generator to the plasma load by minimizing reflected power. It ensures stable plasma ignition and maintains process consistency. Technical Specifications:
Product Description: This part number generally refers to a Chamber Liner Kit or a specific Quartz Shield Assembly used in Gasonics plasma or wet bench tools. It acts as a sacrificial barrier protecting the main stainless steel process chamber from corrosive chemical attacks, plasma erosion, and metallic contamination. The kit ensures high purity by preventing metal ions from leaching into the process environment. Technical Specifications:
Product Description: The Gasonics AWD-D-2-3-002 is a specific configuration of the Automated Wet Decoupled (AWD) plasma stripping system. It features a dual-chamber architecture designed for high-throughput photoresist removal and surface cleaning. The nomenclature indicates a dual-chamber setup ("2"), a 3-slot load lock configuration ("3"), and a specific hardware revision ("002"). It separates plasma generation from the wafer surface to prevent ion damage. Technical Specifications:
Product Description: This component is typically identified as a high-precision Pressure Control Sensor or Transducer Module utilized within Gasonics vacuum processing equipment. It serves as a critical feedback device for the throttle valve control loop, ensuring that the process chamber maintains the exact vacuum level required for stable plasma generation and uniform chemical reactions. Technical Specifications:
Product Description: The Gasonics AWO-1-14 is an Automated Wet Oxidation system or a specific Wet Bench Station configuration. The "AWO" prefix suggests a focus on wet chemical processing, potentially for cleaning or oxidation, while "1-14" indicates a single-tank module or a specific chemical delivery configuration. It is designed for batch processing of wafers. Technical Specifications:
Product Description: This part number typically identifies a Sensor Assembly, specifically a Capacitance Manometer or a Pirani Gauge used for vacuum measurement. Accurate pressure control is vital in plasma processing, and this sensor provides the feedback signal to the throttle valve. Technical Specifications:
Product Description: This part number is commonly associated with a Vacuum Pump Exhaust Filter or a Scrubber Cartridge. It is a critical component for the abatement system of Gasonics tools, ensuring that hazardous or corrosive byproducts from the plasma or wet processes are neutralized before being released into the facility exhaust. Technical Specifications:
Product Description: These part numbers typically refer to a Maintenance Kit or a Consumable Set for Gasonics wet bench or strip tools. The combination suggests a kit containing specific seals, O-rings, and filters required for major preventive maintenance (PM) cycles. "95-0503" might be the kit ID, while "95-2665" specifies a sub-component like a pump filter or a specific seal set. Technical Specifications:
