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AMAT 9101-1745 (DDM-005X-DN-AM)

  • Product Description: A high-performance digital servo drive designed for precise motion control in semiconductor manufacturing equipment. It delivers accurate torque and speed regulation for servo motors.
  • Technical Specifications:
    • Input Voltage: 200-240V AC
    • Control Interface: Multi-channel digital and analog I/O, RS-232/485 communication

AMAT 0242-18596

Product Name: AC Power Distribution / Circuit Breaker Kit
Product Description: A comprehensive kit for power distribution and over-current protection in semiconductor equipment control cabinets. Ensures safe, reliable power management for sensitive electronic components and subsystems.
Technical Specifications:
  • Input Voltage: 208-240 VAC, 3-phase

AMAT 0200-09707

Product Name: Quartz Gas Distribution Ring / Showerhead Component
Product Description: A high-purity fused quartz component engineered for uniform distribution of process gases across the wafer surface. Designed for high-purity applications where contamination from metallic materials is unacceptable.
Technical Specifications:
  • Material: High-purity, synthetic fused silica (quartz)

AMAT 0200-09442

Product Name: Sapphire Viewport Window / Optical Component
Product Description: A high-purity, single-crystal sapphire component designed for optical access and process monitoring in high-vacuum, high-temperature semiconductor chambers. Offers exceptional optical transparency and durability.
Technical Specifications:
  • Material: Optical-grade, single-crystal Sapphire (Al₂O₃)

AMAT 0190-39331

Product Name: Advanced Motion Control Module / Interface Board
Product Description: A high-performance printed circuit board (PCB) module designed for precision control of servo motors and actuators in semiconductor automation systems. Acts as a critical interface between the system controller and motion mechanics.
Technical Specifications:
  • Form Factor: Compact PCI (cPCI) or VME64x

AMAT 0041-04789

Product Name: High-Purity Process Gas Line Assembly
Product Description: A precision-engineered, ultra-clean gas delivery line assembly for transporting high-purity process gases (e.g., precursors, carrier gases) into semiconductor process chambers. Designed for zero contamination and precise flow control.
Technical Specifications:
  • Material: 316L VIM/VAR Stainless Steel, electropolished (EP) internally

AMAT 0021-15694

Product Name: 200mm Waffle-Less Slit Valve Door (LP Type)
Product Description: A precision-machined door assembly for low-pressure (LP) slit valves, designed to create a vacuum-tight seal for 200mm wafer transfer slots. The "waffle-less" design minimizes surface area for particle adhesion and simplifies cleaning.
Technical Specifications:
  • Material: Hard-anodized 6061-T6 aluminum

AMAT 0020-26060

Product Name: DC Bias Ceramic Isolator
Product Description: A specialized ceramic component engineered to provide DC electrical isolation while facilitating efficient thermal management in high-power plasma applications. Optimized for withstanding the intense electrical and thermal stresses of DC-biased processes.
Technical Specifications:
  • Material: High-purity Alumina (Al₂O₃, 99.9%) or Macor® machinable glass-ceramic

AMAT 0020-25920

Product Name: Ceramic Electrical Insulator
Product Description: A high-performance electrical insulator fabricated from advanced technical ceramic, providing robust dielectric isolation in high-voltage, high-temperature sections of semiconductor plasma chambers.
Technical Specifications:
  • Material: High-purity Aluminum Nitride (AlN) or Alumina (Al₂O₃, 99.8%)

AMAT 0020-39252

Product Name: DXZ Lid Clamp Spring Shim
Product Description: A precision-formed spring steel shim designed to provide consistent, uniform clamping force for DXZ chamber lids. Ensures a reliable, vacuum-tight seal by compensating for minute dimensional variations and thermal expansion/contraction.
Technical Specifications:
  • Material: High-strength, spring-tempered stainless steel (17-7 PH, condition C)

AMAT 0020-62324

Product Name: Precision Machined Structural Component
Product Description: A high-precision structural element designed for critical load-bearing and alignment functions within semiconductor processing chambers. Manufactured to ultra-tight tolerances to ensure dimensional stability under high-vacuum and thermal cycling conditions.
Technical Specifications:
  • Material: High-grade, corrosion-resistant aluminum alloy (6061-T6 / 7075-T7351)

AMAT 0020-09796

  • Product Name: Shield, Quartz, Chamber Liner
  • Product Description: High-purity fused silica quartz shield for protecting chamber walls and components from plasma exposure in semiconductor etch processes.
  • Technical Specifications:
    • Material: High-purity synthetic quartz (SiO₂, <1 ppm metallic impurities)