Digital guide
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AMAT 0020-30983
Product Name: Chamber Top Plate
- Product Description: A precision-machined top plate (cover) for a semiconductor process chamber, providing a sealed, structural interface for internal components.
- Technical Specifications:
- Material: High-grade, passivated stainless steel (316L)
- Surface Finish: Electropolished, Ra < 0.5 μm
Detailed content
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- Flange Type: CF (ConFlat) compatible vacuum flanges
- Dimensions: Custom-sized to fit specific chamber (PRSP)
- Weight: ~6 lbs
- Functional Features:
- Ultra-high vacuum (UHV) compatible sealing surfaces
- Precision-drilled ports for feedthroughs, viewports, and injectors
- Rigid structure to maintain chamber alignment under thermal cycling
- Corrosion-resistant passivation for harsh process chemistries
- Easy-to-clean, non-porous surface
- Applications: Top cover assembly for Pre-Clean, PVD, or CVD chambers; provides mounting for gas injectors, viewports, and pressure control devices.
