Digital guide
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AMAT 0190-26769
- Product Description: A multi-range, high-precision vacuum measurement instrument used to monitor pressure levels across a wide spectrum in semiconductor vacuum systems.
- Technical Specifications:
- Measurement Range: 0.1 Torr to 101.325 kPa (Atmospheric Pressure)
- Accuracy: ±0.1% of reading
Detailed content
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- Resolution: 0.01 Torr
- Response Time: 2 seconds at 1 Torr
- Power Supply: 9V DC
- Output: Analog (0-10V) & Digital (RS-485)
- Dimensions: 22.9 x 17.8 x 6.3 cm
- Weight: 0.35 kg
- Functional Features:
- Combined Pirani and Capacitance Diaphragm sensing technology
- Temperature-compensated sensor for stable readings
- Rugged stainless steel construction for corrosive environments
- Programmable set points and alarm triggers
- Local digital display and remote communication capability
- Applications: Vacuum chamber pressure monitoring, load lock control, roughing and high-vacuum pump performance verification in all semiconductor process tools.
