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AMAT 0140-76222

  • Product Name: Control Cable Assembly
  • Product Description: A custom-designed electrical harness for interconnecting control modules, sensors, and actuators within semiconductor process chambers. Ensures stable signal and power transmission.
  • Technical Specifications:
    • Conductor Material: High-purity copper with high-temperature insulation

Detailed content

    • Shielding: Multi-layer EMI/RFI shielding
    • Connector Type: Industrial-grade, vacuum-compatible connectors
    • Length: Custom specified for chamber integration
    • Temperature Rating: -40°C to +125°C
  • Functional Features:
    • Vacuum-outgassing compliant materials
    • Flex-life optimized for repeated chamber movement
    • Secure locking connectors to prevent accidental disconnection
    • Color-coded and labeled for easy identification and maintenance
  • Applications: Internal wiring for PVD, CVD, and Etch chambers; used for connecting RF generators, pressure sensors, and gas flow controllers.

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