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AMAT 0020-91244
- Product Name: Ceramic Insulator Component
- Product Description: A high-purity ceramic insulator part used for electrical isolation and thermal management within semiconductor process chambers.
- Technical Specifications:
- Material: High-density, ultra-pure alumina (Al₂O₃ > 99.6%)
Detailed content
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- Dielectric Strength: > 15 kV/mm
- Thermal Conductivity: ~30 W/m·K
- Max Operating Temperature: 1,700°C
- Surface Finish: Ra < 0.8 μm, polished to prevent particle generation
- Functional Features:
- Excellent electrical insulation in high-voltage environments
- Non-contaminating, ultra-smooth surface for cleanroom compatibility
- High resistance to plasma erosion and chemical corrosion
- Precision-machined tolerances for tight assembly fits
- Low outgassing under high vacuum conditions
- Applications: Standoffs, shields, and spacers in PVD/CVD chambers; isolation for electrodes, RF coils, and heater assemblies.
