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AMAT 0130-03170

Product Name: Precision Flow Meter Assembly
Product Description: A thermal mass flow meter designed for accurate measurement and monitoring of ultra-high purity gas flows in semiconductor process applications.
Technical Specifications:
  • Flow Range: 0 to 10 SLM (standard liters per minute)

AMAT 0010-36160

Product Name: Digital I/O Module Interface Card
Product Description: A microprocessor-based digital input/output interface card for controlling and monitoring discrete signals in semiconductor automation systems.
Technical Specifications:
  • Digital Inputs: 16 channels, 24V DC, optically isolated

AMAT 0041-28291

Product Name: RF Power Feedthrough Assembly
Product Description: A high-voltage radio frequency power feedthrough designed to transmit RF power from external generators into vacuum process chambers.
Technical Specifications:
  • Frequency Rating: 0 to 30 MHz (optimized for 13.56 MHz)

AMAT 0040-44797-011

Product Name: Heated Gas Injector Assembly
Product Description: An integrated heated gas injector designed to deliver preheated process gases into semiconductor deposition chambers, preventing precursor condensation.
Technical Specifications:
  • Material: High-purity 316L stainless steel with quartz nozzle

AMAT 3870-00209

Product Name: Pneumatic Diaphragm Valve Assembly
Product Description: A 2-way normally closed pneumatically actuated diaphragm valve for precise control of ultra-high purity fluids and gases in semiconductor process systems.
Technical Specifications:
  • Valve Type: Diaphragm, 2-way, normally closed

AMAT 0041-64512

Product Name: High-Purity Gas Filter Assembly
Product Description: A precision-engineered ultra-high purity gas filter designed to remove particulates and contaminants from process and purge gas streams in semiconductor manufacturing systems.
Technical Specifications:
  • Material: 316L VIM/VAR electropolished stainless steel

AMAT 03-81723-00

Product Name: Chamber Seal Adapter Flange
Product Description: Precision-machined metal flange used to create vacuum-tight connections between chamber segments, feedthroughs, and external components.
Technical Specifications:
  • Material: 316L electropolished stainless steel

AMAT 0040-38738

Product Name: Heater Jacket Assembly for Chamber Components
Product Description: Flexible heating assembly used to maintain controlled temperatures on gas lines, injectors, and chamber components to prevent condensation and process gas freezing.
Technical Specifications:
  • Heating Type: Resistive flexible heater mat

AMAT 0010-17039

Product Name: Analog Sensor Signal Conditioner
Product Description: Electronic module that amplifies, filters, and linearizes analog signals from pressure, temperature, and flow sensors for system control and monitoring.
Technical Specifications:
  • Input Range: 0–5V, 0–10V, 4–20mA

AMAT 0010-90811

Product Name: Digital Position Sensor Module
Product Description: Non-contact digital sensor used to detect linear or rotational position of moving components within semiconductor automation systems.
Technical Specifications:
  • Sensing Principle: Magnetic Hall-effect detection
  • Supply Voltage: 24V DC

AMAT 0120-93660

Product Name: Flow Control Solenoid Valve Manifold
Product Description: Integrated multi-station manifold assembly with solenoid valves for regulating process and purge gas flows in semiconductor gas delivery systems.
Technical Specifications:
  • Valve Configuration: 2-way normally closed solenoid valves

AMAT 0190-41535

Product Name: Servo Motor Drive Module
Product Description: Compact digital drive module for controlling precision servo motors used in wafer positioning, lift mechanisms, and automated chamber components.
Technical Specifications:
  • Input Voltage: 24V DC
  • Control Interface: Analog ±10V and digital pulse/direction signals