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AMAT 0090-09152

Product Name: Precision Sensor / Transducer Module
Product Description: An electronic sensing module designed to monitor critical process parameters such as pressure, temperature, flow, or position within a vacuum or process environment.
Technical Specifications:
  • Sensing Element: High-stability, high-accuracy micro-machined or solid-state sensor.

AMAT 0020-21684

Product Name: ESC (Electrostatic Chuck) Component / Shield
Product Description: A critical component associated with electrostatic chuck assemblies, used for clamping wafers during processing. It may be a shield, insulator, or structural part of the ESC.
Technical Specifications:
  • Material: High-purity ceramic or thermally conductive composite.

AMAT 0050-35797

Product Name: Stainless Steel Gas Line Weldment / Tubing Assembly
Product Description: A precision-fabricated stainless steel tubing assembly for the delivery of ultra-high purity (UHP) process gases in semiconductor manufacturing.
Technical Specifications:
  • Material: 316L electropolished stainless steel tubing.

AMAT 0150-20069

Product Name: Serial Communication PCB Assembly
Product Description: A printed circuit board assembly designed for serial communication and field control processing within AMAT semiconductor tools. It acts as an interface module for data transmission.
Technical Specifications:
  • Memory: 16 MB SDRAM, 32 MB Flash memory

AMAT 0020-23029

Product Name: Precision Machined Insulator / Spacer
Product Description: A high-performance engineered component used for physical spacing, electrical insulation, or mechanical support within semiconductor process modules.
Technical Specifications:
  • Material: Advanced technical ceramic (Alumina) or high-performance polymer (e.g., Vespel).

AMAT 0021-32583

Product Name: Quartz Shield / Liner Insert
Product Description: A high-purity fused quartz component serving as a protective shield or chamber liner. It contains plasma and process byproducts while being transparent to thermal radiation.
Technical Specifications:
  • Material: High-purity amorphous fused silica (quartz).

AMAT 0870-01002

Product Name: 5-Phase Stepper Motor Driver (Super Vexta UDX5114N)
Product Description: A high-performance bipolar 5-phase stepper motor drive, OEM branded for Applied Materials. It provides precise control for motion systems in semiconductor fabrication tools.
Technical Specifications:
  • Driver Type: Bipolar 5-phase stepper motor driver

AMAT 0010-30029

Product Name: P-Chuck Lift Assembly (Precision 5000)
Product Description: A complete electromechanical lift assembly for the pedestal chuck (P-Chuck) in AMAT Precision 5000 CVD systems. It controls the vertical elevation of the wafer chuck for processing and wafer transfer.
Technical Specifications:
  • Compatibility: Designed exclusively for AMAT Precision 5000 CVD platforms.

AMAT 0021-21984

Product Name: Ceramic Insulator / Isolation Ring
Product Description: A high-purity ceramic component designed for electrical isolation and structural support within semiconductor process chambers. It insulates powered electrodes from grounded chamber components while maintaining mechanical stability.
Technical Specifications:
  • Material: High-purity alumina (Al₂O₃) ceramic, offering exceptional dielectric strength.

AMAT 0010-70321

Product Name: Slit Valve Actuator / Door Assembly
Product Description: A complete electromechanical actuator assembly for operating slit valves or chamber doors in semiconductor vacuum systems. It provides reliable, repeatable motion for isolating process chambers during wafer transfer.
Technical Specifications:
  • Actuator Type: Pneumatic or servo-electric drive for precise positioning.

AMAT 0010-78170

Product Name: Integrated Circuit Board Assembly / Control Module
Product Description: A complex printed circuit board assembly (PCBA) that functions as a control, interface, or processing module within the semiconductor tool's electronic system. It manages I/O signals, communication, or subsystem control.
Technical Specifications:
  • Form Factor: Standard VME, cPCI, or proprietary AMAT backplane compatible.

AMAT 0200-35595

Product Name: Precision Process Ring/Insulator
Product Description: A high-performance ceramic or quartz component used as a ring, shield, or insulator within semiconductor process chambers. It provides electrical isolation, thermal stability, and protection against process byproducts.
Technical Specifications:
  • Material: High-purity quartz (fused silica) or advanced technical ceramic.