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Gasonics 61-0052-U Pneumatic Diaphragm Valve

Introduction: This part number identifies a specific revision or base configuration of the Gasonics 61-0052 series pneumatic diaphragm valve. These valves are fundamental components in high-purity gas handling systems, providing reliable on/off or throttling control. The "U" designation often refers to a specific material specification or a universal configuration suitable for a wide range of semiconductor applications. Technical Specifications:

  • Function: On/Off or Proportional Flow Control

Gasonics MAP130-4000 Mass Flow Controller (MFC)

Introduction: The Gasonics MAP130-4000 is a thermal mass flow controller designed for precise measurement and control of gas flow rates in semiconductor manufacturing. It utilizes the principle of thermal dispersion to measure flow, providing accurate and repeatable delivery of process gases independent of temperature and pressure fluctuations. This device is essential for maintaining process stability in deposition and etching applications. Technical Specifications:

  • Measurement Principle: Thermal Mass Flow (Constant Temperature Anemometry)

Gasonics 61-0052-U AWD-D-1-0-011 Pneumatic Diaphragm Valve

Introduction: This component is a high-purity pneumatic diaphragm valve designed for semiconductor process equipment. It serves as a critical control element for managing the flow of process gases, vacuum lines, or purge gases. The "AWD" series typically indicates a specific diaphragm valve architecture optimized for cleanroom environments, featuring a diaphragm that isolates the actuator from the process media to prevent contamination and ensure leak-tight operation. Technical Specifications:

  • Valve Type: 2-way or 3-way Pneumatic Diaphragm Valve

Gasonics 94-1174 Chamber Seal

Introduction: The Gasonics 94-1174 is a sealing kit, typically consisting of elastomeric O-rings, gaskets, or quad-rings. These components are critical for maintaining the vacuum integrity of the process chamber, ensuring that gases do not leak in or out and that the required vacuum level is achieved and sustained. Technical Specifications:

  • Component Type: Static or Dynamic Seal
  • Material: Viton (FKM), Kalrez (FFKM), or Buna-N (Nitrile)

Gasonics 90-1031-01 Process Controller

Introduction: The Gasonics 90-1031-01 is an electronic control module, likely a Programmable Logic Controller (PLC) or a dedicated process control interface card. It serves as the "brain" for a specific subsystem within the Gasonics tool, managing sequences, interlocks, and analog I/O. Technical Specifications:

  • Type: Industrial Controller / PCB Assembly
  • CPU: 32-bit or 64-bit Processor

Gasonics 95-2736 Vacuum Throttle Valve

Introduction: The Gasonics 95-2736 is a precision vacuum throttle valve used to regulate the pressure inside a process chamber by controlling the pumping speed. It allows for precise control of gas flow conductance between the chamber and the vacuum pump. Technical Specifications:

  • Valve Type: Pneumatically actuated butterfly or poppet valve
  • Port Size: ISO-K or ISO-F flange (e.g., 6-inch, 8-inch)

Gasonics A95-006-01 Matching Network

Introduction: The Gasonics A95-006-01 is a printed circuit board (PCB) assembly or sub-module that forms the control logic for an RF impedance matching network. It processes feedback signals from the plasma chamber and drives motorized capacitors or variable inductors to achieve a 1:1 Standing Wave Ratio (SWR). Technical Specifications:

  • Function: Automatic Impedance Matching Control
  • Input Signals: Forward Power, Reflected Power, Phase Angle

Gasonics 0510X-LA24-ABA Inductive Sensor

Introduction: The Gasonics 0510X-LA24-ABA is an industrial-grade inductive proximity sensor. It is used to detect the presence of metallic objects (such as wafers, robot arms, or chamber lids) without physical contact. It operates on the principle of electromagnetic induction, generating an oscillating field that is dampened when a metal target enters the sensing range. Technical Specifications:

  • Sensing Principle: Inductive (Oscillator-based)
  • Housing Size: M12 or M18 cylindrical barrel (Standard industrial size)

Gasonics A90-005-02 RF Generator (13.56 MHz)

Introduction: The Gasonics A90-005-02 is a solid-state or tube-based RF generator operating at the standard 13.56 MHz frequency. It is the primary source of electromagnetic energy used to create and sustain plasma within the processing chamber. This generator is known for its reliability and precision in power delivery. Technical Specifications:

  • Type: RF Power Generator (Solid State or Tetrode)
  • Frequency: 13.56 MHz ± 0.005%

Gasonics 12-300000-30 High Voltage Power Supply (HVPS)

Introduction: The Gasonics 12-300000-30 is a specialized high voltage power supply module designed to provide the necessary electrical potential for plasma ignition or ion acceleration within Gasonics process tools. It converts standard facility power into high-voltage DC or pulsed output required to sustain specific plasma densities. Technical Specifications:

  • Output Voltage: 0 to 30 kV DC (adjustable)
  • Output Current: Up to 100 mA (depending on load)

Gasonics AWD-D-2-8-5-003 Pneumatic Diaphragm Valve

Introduction: The Gasonics AWD-D-2-8-5-003 is a high-purity pneumatic valve assembly designed for precise control of process gases or vacuum lines within semiconductor manufacturing equipment. It utilizes a diaphragm mechanism to isolate the actuator from the process media, ensuring no contamination and leak-tight operation. Technical Specifications:

  • Valve Type: 2-way or 3-way Pneumatic Diaphragm Valve
  • Port Size: Typically 1/4 inch VCR or Swagelok fitting

Gasonics 16025-02 Process Chamber Liner

Introduction: The Gasonics 16025-02 is a protective consumable component, typically serving as a chamber liner or shield. It is installed inside the plasma processing chamber to protect the main chamber walls and expensive internal components from chemical corrosion, physical sputtering, and particle contamination generated during high-energy plasma processes. Technical Specifications:

  • Material: High-purity Aluminum (Al 6061-T6), Anodized Aluminum, or Quartz (depending on specific chemistry)