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Gasonics 17317-01D Vacuum System

Product Description: This component is typically a pneumatic throttle valve or a vacuum control module integral to the gas handling system of Gasonics plasma strippers. It regulates the pressure within the process chamber by controlling the pumping speed, which is critical for determining the plasma characteristics (density and ion energy). The "D" suffix denotes a specific revision or material variant. Technical Specifications:

  • Type: Pneumatic Butterfly Valve or Throttle Valve

Gasonics A95-107-01 B Plasma Chamber Component

Product Description: This part number identifies a specific mechanical sub-assembly, likely an electrode or showerhead assembly, utilized in Gasonics plasma processing equipment. It is designed to introduce process gases into the reaction chamber uniformly and serve as the powered or grounded surface for plasma generation. The "B" revision indicates a specific design iteration. Technical Specifications:

  • Material: Aluminum, Anodized Aluminum, or Stainless Steel (316L) with ceramic insulators (Quartz or Alumina).

Gasonics A93-038-01 RF Power Supply

Product Description: This unit is a critical internal component or sub-assembly typically used within Gasonics plasma stripping and cleaning systems. It functions as an RF power supply or a matching network component responsible for generating and controlling the radio frequency energy required to ignite and sustain the plasma discharge during the semiconductor manufacturing process. Technical Specifications:

  • Type: Radio Frequency (RF) Generator or Matching Network Sub-assembly

Gasonics 93-00105A Chamber Component

Introduction: The Gasonics 93-00105A is a specific hardware assembly or component kit. Based on the "93" prefix, this is likely a mechanical part related to the chamber body, lid, or internal fixture. It could be a bracket, a handle, a hinge, or a specific sensor mount. It ensures the mechanical integrity and alignment of internal components. Technical Specifications:

  • Component Type: Mechanical Assembly / Bracket / Mount

Gasonics AE 2001 RF Generator

Introduction: The Gasonics AE 2001 is a high-performance RF (Radio Frequency) power generator. The "AE" prefix often indicates an "Advanced Energy" compatible or Gasonics-branded solid-state generator. It is designed to deliver precise RF power for plasma generation in semiconductor manufacturing processes like etching, deposition, and ashing. Technical Specifications:

  • Type: Solid State RF Power Generator

Gasonics AWO-1-2 Optical Viewport

Introduction: The Gasonics AWO-1-2 is a specific optical viewport configuration. It is a critical component for maintaining vacuum integrity while allowing light to pass through the chamber wall. This model is often used in older or specific generations of Gasonics equipment. Technical Specifications:

  • Window Type: Circular Optical Flat
  • Material: Synthetic Fused Silica

Gasonics AWO-1-3 Optical Window

Introduction: The Gasonics AWO-1-3 is an optical viewport assembly with a specific dimension (likely 1.3 inches or a corresponding flange code). It bridges the gap between the smallest and medium-sized viewports, offering a balance of optical access and mechanical robustness. Technical Specifications:

  • Optical Element: Fused Quartz
  • Clear Aperture: Specific to AWO-1-3 (e.g., 1.375 inches)

Gasonics AWO-1-1 Optical Viewport

Introduction: The Gasonics AWO-1-1 is the base or smallest configuration in the AWO viewport series. It provides a fundamental optical access port for vacuum chambers. This component is essential for basic visual inspection and simple optical sensor integration. Technical Specifications:

  • Type: Vacuum Optical Window
  • Material: Borosilicate Glass or Fused Silica

Gasonics AWO-1-4 Optical Viewport Assembly

Introduction: The Gasonics AWO-1-4 is a compact optical viewport assembly. It is designed to fit into space-constrained environments while providing essential optical access for monitoring and diagnostics. The "1-4" typically denotes a smaller aperture size compared to other AWO models. Technical Specifications:

  • Window Material: Quartz or Tempered Glass
  • Aperture Size: Small form factor (e.g., 1.4 inches or 35mm)

Gasonics AWO-1-10 Optical Viewport

Introduction: The Gasonics AWO-1-10 is a large-format or specific-dimension optical viewport designed for semiconductor process equipment. It provides a robust seal and high optical quality for demanding applications where large viewing angles or high light throughput is required. Technical Specifications:

  • Optical Material: High-Purity Fused Quartz
  • Diameter: 10 mm to 10 inches (Context suggests likely ~2 inches or specific flange)

Gasonics AWO-1-7 Optical Window

Introduction: The Gasonics AWO-1-7 is a specific configuration of an optical viewport from the AWO series. It serves as a critical interface for optical diagnostics and visual inspection in vacuum process chambers. The "1-7" designation typically refers to the physical size or flange specification. Technical Specifications:

  • Type: Vacuum Viewport
  • Optical Material: Borosilicate or Fused Silica

Gasonics AWO-1-9 Optical Viewport Assembly

Introduction: The Gasonics AWO-1-9 is a viewport assembly designed for high-purity semiconductor equipment. It allows for the transmission of light into or out of the vacuum chamber while maintaining a hermetic seal. This specific model is tailored for applications requiring high optical throughput and resistance to plasma erosion. Technical Specifications:

  • Window Material: Synthetic Fused Silica (Quartz)