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AMAT 0015-20124

Product Name: Motor Brake and Clutch Assembly
Product Description: An electromagnetic brake and clutch unit designed to secure robot arm position during power interruptions, ensure safe motion control, and prevent unintended movement in wafer handling systems.
Technical Specifications:
  • Operating Voltage: 24V DC

AMAT 0021-36627

Product Name: Chamber Gas Baffle Shield Assembly
Product Description: A multi‑functional metal shield that redirects and diffuses process gas flow, confines plasma, and protects chamber walls from sputtered deposition in PVD and etch environments.
Technical Specifications:
  • Material: High‑purity aluminum with ceramic plasma‑resistant coating

AMAT 0010-27495

Product Name: Robot Drive Motor Encoder Assembly
Product Description: A high‑resolution optical encoder integrated with a servo motor to provide real‑time position, speed, and direction feedback for wafer handling robot motion control systems.
Technical Specifications:
  • Encoder Type: Incremental optical encoder

AMAT 3420-01078

Product Name: High‑Purity Stainless Steel Pipe Fitting Adapter
Product Description: A precision‑machined metal adapter used to connect different sizes or types of ultra‑high purity gas lines, ensuring hermetic sealing and consistent flow in semiconductor gas delivery systems.
Technical Specifications:
  • Material: 316L VIM‑VAR stainless steel

AMAT 0150-75041

Product Name: High‑Voltage Power Cable Assembly
Product Description: A heavy‑duty, shielded power cable assembly engineered to transmit high‑voltage DC or RF power between power supplies, match networks, and process chamber components.
Technical Specifications:
  • Conductor: Stranded oxygen‑free tinned copper

AMAT 0010-03487

Product Name: Wafer Handling Robot Arm Shaft Assembly
Product Description: A high‑precision drive shaft assembly for wafer transfer robots, transmitting rotational and linear motion while maintaining rigidity, flatness, and cleanliness during wafer transportation.
Technical Specifications:
  • Material: Hard‑coated aluminum alloy with stainless steel reinforcement

AMAT 1350-00683

Product Name: Pneumatic Solenoid Valve Manifold Block
Product Description: A precision-machined manifold block designed to integrate multiple pneumatic solenoid valves into a compact assembly, enabling centralized control of various actuators, valves, and cylinders in semiconductor processing equipment.
Technical Specifications:
  • Material: Anodized 6061‑T6 aluminum alloy

AMAT 0020-34694

Product Name: GDP Oxide Process Chamber Liner
Product Description: A high-purity quartz chamber liner engineered for Gas Distribution Plate (GDP) oxide deposition processes, providing a chemically inert, non-contaminating surface that maintains process purity and uniform gas flow.
Technical Specifications:
  • Material: High-purity UV-grade fused quartz

AMAT 0270-20212

roduct Name: Wafer Robot Calibration Tool Assembly
Product Description: A precision calibration fixture used to calibrate wafer handling robots, ensuring accurate positioning, repeatability, and alignment between robot end-effectors and process module load ports.
Technical Specifications:
  • Base Material: Stainless steel with precision ground reference surfaces

AMAT 0021-09104

Product Name: Precision-Aligned Cathode Liner Assembly
Product Description: A high-purity aluminum cathode liner with precision alignment features, designed to surround PVD cathodes, confine plasma, and ensure uniform sputtering deposition while protecting chamber components.
Technical Specifications:
  • Material: High-purity 6061-T6 aluminum alloy

AMAT 3700-02425

Product Name: High-Performance Formed Dovetail Seal O-Ring
Product Description: A precision-molded perfluoroelastomer (FFKM) O-ring designed for dovetail groove installations, providing exceptional vacuum sealing in high-temperature, chemically aggressive semiconductor process environments.
Technical Specifications:
  • Material: Chemraz® SC513 perfluoroelastomer

AMAT 0200-36122

Product Name: High-Temperature Resistant Ceramic Chamber Shield
Product Description: A single-piece ceramic shield component that lines the upper chamber region, protecting chamber walls from high-temperature plasma and deposition byproducts during advanced semiconductor processes.
Technical Specifications:
  • Material: High-purity yttria-stabilized zirconia (YSZ)