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Gasonics A93-038-01 RF Power Supply

Product Description: This unit is a critical internal component or sub-assembly typically used within Gasonics plasma stripping and cleaning systems. It functions as an RF power supply or a matching network component responsible for generating and controlling the radio frequency energy required to ignite and sustain the plasma discharge during the semiconductor manufacturing process. Technical Specifications:

  • Type: Radio Frequency (RF) Generator or Matching Network Sub-assembly

Gasonics 93-00105A Chamber Component

Introduction: The Gasonics 93-00105A is a specific hardware assembly or component kit. Based on the "93" prefix, this is likely a mechanical part related to the chamber body, lid, or internal fixture. It could be a bracket, a handle, a hinge, or a specific sensor mount. It ensures the mechanical integrity and alignment of internal components. Technical Specifications:

  • Component Type: Mechanical Assembly / Bracket / Mount

Gasonics AE 2001 RF Generator

Introduction: The Gasonics AE 2001 is a high-performance RF (Radio Frequency) power generator. The "AE" prefix often indicates an "Advanced Energy" compatible or Gasonics-branded solid-state generator. It is designed to deliver precise RF power for plasma generation in semiconductor manufacturing processes like etching, deposition, and ashing. Technical Specifications:

  • Type: Solid State RF Power Generator

Gasonics AWO-1-2 Optical Viewport

Introduction: The Gasonics AWO-1-2 is a specific optical viewport configuration. It is a critical component for maintaining vacuum integrity while allowing light to pass through the chamber wall. This model is often used in older or specific generations of Gasonics equipment. Technical Specifications:

  • Window Type: Circular Optical Flat
  • Material: Synthetic Fused Silica

Gasonics AWO-1-3 Optical Window

Introduction: The Gasonics AWO-1-3 is an optical viewport assembly with a specific dimension (likely 1.3 inches or a corresponding flange code). It bridges the gap between the smallest and medium-sized viewports, offering a balance of optical access and mechanical robustness. Technical Specifications:

  • Optical Element: Fused Quartz
  • Clear Aperture: Specific to AWO-1-3 (e.g., 1.375 inches)

Gasonics AWO-1-1 Optical Viewport

Introduction: The Gasonics AWO-1-1 is the base or smallest configuration in the AWO viewport series. It provides a fundamental optical access port for vacuum chambers. This component is essential for basic visual inspection and simple optical sensor integration. Technical Specifications:

  • Type: Vacuum Optical Window
  • Material: Borosilicate Glass or Fused Silica

Gasonics AWO-1-4 Optical Viewport Assembly

Introduction: The Gasonics AWO-1-4 is a compact optical viewport assembly. It is designed to fit into space-constrained environments while providing essential optical access for monitoring and diagnostics. The "1-4" typically denotes a smaller aperture size compared to other AWO models. Technical Specifications:

  • Window Material: Quartz or Tempered Glass
  • Aperture Size: Small form factor (e.g., 1.4 inches or 35mm)

Gasonics AWO-1-10 Optical Viewport

Introduction: The Gasonics AWO-1-10 is a large-format or specific-dimension optical viewport designed for semiconductor process equipment. It provides a robust seal and high optical quality for demanding applications where large viewing angles or high light throughput is required. Technical Specifications:

  • Optical Material: High-Purity Fused Quartz
  • Diameter: 10 mm to 10 inches (Context suggests likely ~2 inches or specific flange)

Gasonics AWO-1-7 Optical Window

Introduction: The Gasonics AWO-1-7 is a specific configuration of an optical viewport from the AWO series. It serves as a critical interface for optical diagnostics and visual inspection in vacuum process chambers. The "1-7" designation typically refers to the physical size or flange specification. Technical Specifications:

  • Type: Vacuum Viewport
  • Optical Material: Borosilicate or Fused Silica

Gasonics AWO-1-9 Optical Viewport Assembly

Introduction: The Gasonics AWO-1-9 is a viewport assembly designed for high-purity semiconductor equipment. It allows for the transmission of light into or out of the vacuum chamber while maintaining a hermetic seal. This specific model is tailored for applications requiring high optical throughput and resistance to plasma erosion. Technical Specifications:

  • Window Material: Synthetic Fused Silica (Quartz)

Gasonics AWO-1-8 Optical Viewport

Introduction: The Gasonics AWO-1-8 is an optical viewport assembly with a specific flange or aperture size (likely related to the "1-8" dimension, such as 1.8 inches or a specific ISO flange code). It provides a sealed optical interface for visual monitoring and diagnostic access in vacuum environments. Technical Specifications:

  • Optical Material: Fused Quartz or Borosilicate Glass
  • Clear Aperture: Dependent on specific "1-8" configuration (e.g., 1.8 inch diameter)

Gasonics 17330-0 Process Chamber

Introduction: The Gasonics 17330-0 appears to be a hardware kit or a specific chamber component assembly. Based on similar part numbers, this could be a set of chamber liners, shields, or mounting hardware. It serves as a protective or structural element within the process chamber, ensuring vacuum integrity and protecting expensive internal components from plasma erosion. Technical Specifications:

  • Component Type: Chamber Liner, Shield, or Mounting Hardware Kit