Shop

You are here:
  1. Home
  2. Shop
  3. Page 515

AMAT 0200-10390

Product Name: Chamber RPS GDP Assembly
Product Description: A precision-engineered chamber component assembly for Remote Plasma Source (RPS) and Gas Distribution Plate (GDP) systems in semiconductor manufacturing equipment.
Technical Specifications:
  • Material: 316L stainless steel

AMAT 0270-70048

Product Name: 8" Lift-to-Robot Calibration Plate Assembly
Product Description: A precision calibration plate designed for accurate alignment between wafer lift mechanisms and robot transfer systems in 8" (200mm) semiconductor manufacturing equipment.
Technical Specifications:
  • Material: Anodized aluminum alloy (6061-T6)

AMAT 0010-21828

Product Name: Wafer Lift Pin Assembly
Product Description: A precision-engineered wafer lift pin assembly designed for vertical positioning of wafers in semiconductor process chambers, ensuring accurate, repeatable wafer handling with minimal contamination.
Technical Specifications:
  • Material: High-purity alumina ceramic (99.8%)

AMAT 0020-42082

Product Name: Ceramic Isolator Spacer Assembly
Product Description: A high-performance ceramic isolator spacer providing electrical isolation between chamber components while maintaining mechanical stability and vacuum integrity in semiconductor processing equipment.
Technical Specifications:
  • Material: High-purity aluminum nitride (AlN) ceramic

AMAT 0021-29364

Product Name: RF Shield Isolator Ring Assembly
Product Description: A precision-engineered ceramic isolator ring designed to provide electrical isolation for RF shield components in semiconductor plasma processing chambers, ensuring stable plasma generation and containment while maintaining vacuum integrity.
Technical Specifications:
  • Material: High-purity alumina ceramic (99.8%)

AMAT LCAT200P-20001

Product Name: 200mm Wafer Cassette Alignment Tool
Product Description: A precision alignment tool designed for accurate positioning of 200mm wafer cassettes in AMAT Centura and Endura semiconductor manufacturing systems, ensuring proper wafer loading and transfer.
Technical Specifications:
  • Material: Anodized aluminum alloy

AMAT 0010-78680

Product Name: Wafer Lift Pin Assembly
Product Description: A precision-engineered wafer lift pin assembly designed for vertical positioning of wafers in semiconductor process chambers, ensuring accurate, repeatable wafer handling.
Technical Specifications:
  • Material: High-purity alumina ceramic (99.8%)

AMAT 0050-70558

Product Name: Gas Manifold Assembly
Product Description: A precision-engineered gas manifold assembly for semiconductor process equipment, providing safe, controlled distribution of process gases to multiple chamber locations.
Technical Specifications:
  • Material: 316L stainless steel

AMAT 0190-51072

Product Name: Servo Drive Controller Module
Product Description: A high-performance servo drive controller module designed for precise motion control in semiconductor wafer handling and positioning systems.
Technical Specifications:
  • Input Voltage: 24–48V DC

AMAT 0190-09779

Product Name: RF Match Network Controller Module
Product Description: A high-performance RF match network controller module designed for precise impedance matching in semiconductor plasma processing equipment, ensuring efficient RF power transfer to process chambers.
Technical Specifications:
  • Input Voltage: 24V DC ±10%

AMAT 0041-02256

Product Name: Chamber Liner Assembly
Product Description: A high-purity chamber liner assembly designed for semiconductor process chambers, providing a protective interior surface while maintaining process purity and vacuum integrity.
Technical Specifications:
  • Material: High-purity quartz (fused silica)

AMAT 0040-52451

Product Name: TXZ Process Chamber Shower Head Assembly
Product Description: A precision-engineered shower head assembly for TXZ series semiconductor process chambers, providing uniform gas distribution for consistent thin-film deposition processes.
Technical Specifications:
  • Material: 316L stainless steel