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AMAT 0040-09312
Product Name: Main Vacuum Chamber Body & Structural Shell Assembly
Product Description: The main structural shell and vacuum cavity body of semiconductor process equipment, providing a closed ultra‑high vacuum environment for wafer processing. It integrates various functional interfaces and has high structural rigidity and vacuum integrity.
Technical Specifications:
- Material: Low‑outgassing high‑strength aluminum alloy or 316L stainless steel
Detailed content
- Vacuum Leak Rate: ≤1×10⁻⁹ mbar·l/s, meeting UHV standards
- Surface Treatment: Electropolishing, passivation, chemical polishing to reduce adsorption
- Interface Configuration: Precisely machined gas ports, RF feedthrough ports, sensor ports, viewport ports and gate valve interfaces
- Pressure Resistance: Withstands pressure shock during ventilation and vacuum pumping
- Dimensional Stability: Precision machining ensures internal component alignment accuracy
Key Features:
- Excellent vacuum sealing performance and long‑term stability
- High structural rigidity, no deformation during thermal cycle and vacuum pumping
- Low magnetic permeability, does not interfere with plasma and ion beam processes
- Optimized wall structure to reduce particle accumulation
- Compatible with various vacuum pumps and pressure control systems
Application Scenarios:
As the core vacuum cavity structure of AMAT Centura, Endura and Producer series platforms, it is used in deposition, etching, cleaning, annealing and other process modules to provide a closed and controllable process environment.
