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AMAT 0021-70220
Product Name: High‑Purity Ceramic Electrical Insulator & Plasma Isolation Component
Product Description: A high‑performance electrical insulation and plasma isolation component made of ultra‑high‑purity ceramic materials, used to isolate high‑voltage RF circuits, block plasma leakage, support internal components and prevent electrical breakdown in process chambers.
Technical Specifications:
- Material: High‑purity alumina (Al₂O₃), yttria‑stabilized zirconia (YSZ) or boron nitride composite ceramic
Detailed content
- Dielectric Strength: ≥15kV/mm, excellent high‑voltage insulation performance
- Operating Temperature: Up to 800°C for long‑term use
- Plasma Resistance: Resistant to fluorine‑based, chlorine‑based and oxygen‑based plasma etching
- Density: High compactness, no pores, low particle generation rate
- Dimensional Accuracy: Precision molding and machining to ensure assembly fit
Key Features:
- Excellent electrical isolation performance to avoid RF crosstalk and arcing discharge
- Extremely low metal ion precipitation, meeting ultra‑clean process requirements
- High thermal shock resistance, stable performance under rapid temperature change
- Low dielectric loss, does not affect RF power transmission efficiency
- High mechanical strength, resistant to mechanical vibration and thermal stress
Application Scenarios:
Used as RF electrode insulators, chamber isolation columns, plasma shielding parts, power supply isolation parts and component supports in etching, PVD, CVD and other plasma process chambers of AMAT equipment.
