Digital guide
You are here:
AMAT 0040-38858
Product Name: Utility Interface Panel & Gas Distribution Manifold
Product Description: A centralized interface panel and gas distribution manifold used for process chamber utility connection, realizing the integrated access of process gas, purge gas, vacuum pipeline, cooling water circuit and signal circuit, and ensuring the stability and safety of fluid and electrical transmission.
Technical Specifications:
- Material: 316L stainless steel, electropolished aluminum alloy
Detailed content
- Gas Path: Multi‑channel independent gas passage, no cross‑contamination
- Pressure Rating: Withstands high‑pressure gas supply and vacuum negative pressure
- Sealing Method: Metal gasket or high‑grade fluororubber seal
- Interface Type: Standard VCR, Swagelok and electrical connector interface
- Cleanliness: Wetted parts cleaned by UHP level, assembled in Class 10 cleanroom
Key Features:
- Centralized management of multiple utilities, simplifying pipeline layout
- Leak‑free design to ensure process gas and vacuum stability
- Corrosion resistance to special process gases such as halogenated gases
- Modular design, convenient for maintenance and component replacement
- Built‑in flow stabilization structure to reduce gas pressure fluctuation
Application Scenarios:
Used for gas distribution, vacuum interface, cooling circuit connection and electrical signal access of process chambers in semiconductor manufacturing equipment, matching with gas cabinets, vacuum pump sets and control systems.
