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AMAT 0190-24298
Product Name: High‑Power RF Coaxial Cable & Transmission Assembly
Product Description: A professional high‑power, low‑loss RF coaxial cable assembly designed for semiconductor plasma equipment, used to transmit high‑power RF energy from RF generator to matching network and process chamber, ensuring stable plasma excitation.
Technical Specifications:
- Impedance: Standard 50Ω impedance matching
Detailed content
- Frequency Range: Optimized for 13.56MHz, 27MHz, 60MHz industrial ISM frequency band
- Power Capacity: Supports high‑power RF transmission above kW level
- Structure: Multi‑layer shielding, low‑loss dielectric material, high‑temperature resistant outer sheath
- Connector: Gold‑plated high‑power RF connector, low reflection coefficient
- Length: Custom fixed length to ensure field consistency
- Bending Performance: Good flexibility, resistant to repeated bending without performance degradation
Key Features:
- Ultra‑low RF signal loss, high power transmission efficiency
- Multi‑layer shielding structure to eliminate external electromagnetic interference
- High voltage resistance, avoiding breakdown and discharge in plasma environment
- Stable performance in long‑term high‑power operation, no heat accumulation
- Excellent anti‑interference ability to ensure process repeatability
Application Scenarios:
Used to connect RF power supply, matching network and plasma chamber in AMAT etching, PECVD, PVD and other process equipment to provide stable RF power for plasma generation and control.
