Digital guide
You are here:
AMAT 0021-26276
Product Name: High‑Purity Quartz & Ceramic Process Kit Component
Product Description: A precision component made of ultra‑high‑purity quartz or advanced ceramic, used as gas distribution ring, focus ring, insulation ring, process kit insert and optical window in the process chamber to ensure process stability and low contamination.
Technical Specifications:
- Material: Ultra‑high‑purity fused silica quartz, high‑purity alumina ceramic or silicon carbide
Detailed content
- Metal Impurity Content: ppb level ultra‑low impurity precipitation
- Temperature Resistance: Up to 1000°C for long‑term use
- Optical Performance: Quartz products have high transmittance in ultraviolet and infrared bands
- Plasma Compatibility: Resistant to strong corrosion of various process plasmas
- Machining Accuracy: Complex shape precision molding, micron‑level dimensional tolerance
Key Features:
- Extremely high chemical purity, avoiding metal contamination on wafer surface
- Excellent thermal shock resistance, adapting to rapid temperature rise and fall processes
- Quartz products support optical detection and plasma monitoring
- Low particle generation, reducing wafer defects
- High dimensional stability, no deformation during long‑term plasma exposure
Application Scenarios:
Used as focus ring, gas showerhead accessories, insulation ring, process kit liner and optical observation window in etching, CVD, ALD and other processes, especially for advanced processes with strict contamination control.
