Digital guide
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AMAT 0090-20298
- Product Name: RF Match Back Cover Fan Assembly
- Product Description: A cooling fan assembly integrated into the back cover of an RF Match network, providing forced-air cooling to maintain optimal operating temperatures.
- Technical Specifications:
- Fan Type: High-static pressure, brushless DC fan
Detailed content
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- Air Flow: ~15 CFM
- Noise Level: < 40 dB
- Power Supply: 24V DC
- Mounting: Integrated into protective metal cover
- Functional Features:
- Maintenance-free, long-life bearing design (L10 > 50,000 hrs)
- Thermal sensor-controlled speed regulation
- Protective grille and dust filter
- Shock and vibration resistant
- Locking connectors for secure installation
- Applications: Cooling for RF Matching Networks in PVD, CVD, and Etch chambers, specifically on Vectra I systems, preventing overheating of power transistors and capacitors.
