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AMAT 0020-34587
Product Name: Chamber Liner Shield
Product Description: A one-piece, formed quartz or ceramic liner designed to line the interior walls of a process chamber, protecting them from coating and plasma damage.
Technical Specifications:
- Material: High-purity fused quartz or sintered alumina ceramic
Detailed content
- Wall Thickness: Uniform 3mm thickness for structural integrity
- Seal Surfaces: Precision-ground edges for vacuum-tight sealing
- Compatibility: Fits specific chamber bore diameters (200mm/300mm)
Functional Features:
- Contains process plasma and byproducts, protecting the main chamber body.
- Easily replaceable consumable, extending the life of the primary chamber.
- Material maintains purity and prevents contamination of the wafer.
- Designed for easy installation and removal during preventive maintenance.
Application Scenarios: Used as a sacrificial liner in PVD, Etch, and CVD chambers to reduce maintenance costs and downtime.
