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AMAT 0020-29342
Product Name: High-Temperature Ceramic Insulator Ring
Product Description: A robust ceramic ring providing electrical isolation and thermal stability for high-voltage and RF components within semiconductor process chambers.
Technical Specifications:
- Material: High-purity boron nitride (BN) ceramic composite
Detailed content
- Dielectric Strength: >15kV/mm
- Max Operating Temp: 1800°C in inert/vacuum environments
- Thermal Conductivity: High thermal dissipation for efficient heat removal
- Form Factor: Precision-machined annular ring with concentric grooves
Functional Features:
- Provides superior electrical isolation in high RF/voltage fields.
- Excellent thermal shock resistance during rapid process temperature changes.
- Resistant to plasma erosion and chemical attack from halogen-based gases.
- Non-contaminating, low-outgassing material suitable for UHV applications.
Application Scenarios: RF coil isolation, electrode insulation, and high-voltage feedthroughs in Etch and PECVD chambers.
