Digital guide

You are here:

LAM Research 810-234640-312

Product Name​
High-reliability isolated power distribution module for semiconductor process equipment.
Introduction​
This module converts facility AC input into multiple isolated DC outputs for motion control, data acquisition, temperature control and other tool subsystems. It is designed for advanced etch, CVD and metal deposition platforms where electrical isolation and power stability are critical.

Detailed content

Technical Specifications​
Input is 100 to 240 volts AC, single phase, 50 or 60 hertz. Outputs are 12 isolated DC channels: 8 channels at 24 volts DC with 5 amps maximum each, total 30 amps, and 4 channels at 48 volts DC with 3 amps maximum each, total 12 amps. Isolation is 2.5 kilovolts AC input to output and 1 kilovolt AC output to output. Voltage regulation is plus or minus 1 percent at 90 percent load. Efficiency is 92 percent or higher at full load with 230 volts AC input.
Functional Features​
Per-channel overvoltage, overcurrent, short-circuit, over-temperature and reverse-polarity protection. Real-time voltage, current and temperature monitoring. Power consumption logging per channel. Configurable protection thresholds reduce collateral impact during single-channel faults.
Application Scenarios​
Used in Centura etch, Sym3 CVD and Versys metal deposition systems. Suitable for 300 mm wafer fabs requiring isolated power for motion, DAQ, thermal and vacuum subsystems.
Performance Parameters​
Communication interfaces include RS-485 and USB-C. Protocols include Modbus RTU and proprietary Lam power-link communication. Operating temperature is 0 to 50 degrees Celsius. Relative humidity is 5 to 90 percent non-condensing. MTBF exceeds 250,000 hours in listed industrial qualification data.
Material Composition​
Corrosion-resistant aluminum housing, conformal-coated PCB, industrial power semiconductors, magnetic components, isolation transformers or opto-isolated circuits, and ESD-protected assemblies.
Structural Characteristics​
19-inch rack mountable 4U body. Dimensions are 250 millimeters wide, 320 millimeters high and 160 millimeters deep excluding connectors. Two 60-pin terminal blocks handle input and output power. Two variable-speed fans and passive heat sinks provide cooling.
Working Principle​
AC input is rectified and regulated into isolated DC rails. Each output channel is independently controlled and monitored. Protection logic isolates a faulted channel without shutting down unrelated channels, maintaining continued operation of critical subsystems.
Installation Requirements​
Mount in a 19-inch rack with adequate clearance for airflow. Connect AC input through approved facility disconnects. Torque terminal blocks to specification. Configure RS-485 or USB-C monitoring before system energization. Verify SEMI S2, S8 and S14 compliance documentation for site acceptance.
Usage Precautions​
Do not exceed per-channel current ratings. Maintain ambient temperature below activation limits for over-temperature protection. Use ESD-safe handling for board service. Review 90-day power logs to identify aging motors or rising leakage currents before failure occurs.

You may also like