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Gasonics AWO-1-7 Optical Window
Introduction:
The Gasonics AWO-1-7 is a specific configuration of an optical viewport from the AWO series. It serves as a critical interface for optical diagnostics and visual inspection in vacuum process chambers. The “1-7” designation typically refers to the physical size or flange specification.
Technical Specifications:
- Type: Vacuum Viewport
- Optical Material: Borosilicate or Fused Silica
Detailed content
- Clear Aperture: Defined by the 1-7 spec (e.g., 1.75 inches)
- Vacuum Rating: < 1 x 10^-8 Torr
- Pressure Differential: 14.7 psi
- Temperature Range: -20°C to +200°C
- Seal Material: Viton or Copper (for bakeable versions)
Functional Features:
- Optical Access: Provides a clear line of sight into the plasma chamber.
- Vacuum Integrity: Maintains seal integrity under thermal and mechanical stress.
- Erosion Resistance: Protects the optical surface from plasma spray and deposition.
- Standardized Mounting: Fits standard ISO or Conflat flange patterns for easy integration.
Application Scenarios:
- Process Observation: Monitoring plasma glow color and stability.
- Sensor Housing: Protecting delicate optical sensors from the harsh process environment.
- Laser Windows: Transmitting laser beams for alignment or annealing.
- Chamber Cleaning Indicators: Visual check for residue after cleaning cycles.
