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Gasonics 95-0552 A Vacuum Throttle Valve
Introduction:
The Gasonics 95-0552 A is a precision vacuum throttle valve, likely a poppet or butterfly design, identified by the “A” revision or configuration code. It is designed for high-accuracy pressure regulation in semiconductor process tools, ensuring process repeatability and chamber protection.
Technical Specifications:
- Valve Type: Throttle Valve (Poppet or Butterfly)
- Flange Size: Likely 6-inch or 8-inch ISO standard
Detailed content
- Actuation Method: Pneumatic cylinder with position feedback
- Control Signal: 0-10VDC or 4-20mA corresponding to valve position
- Seal Material: Viton, Buna-N, or Kalrez (for chemical resistance)
- Maximum Pressure Differential: Full atmospheric (14.7 psi)
- Operating Temperature: -10°C to +150°C
Functional Features:
- High Resolution Positioning: Fine control over valve aperture allows for precise pressure setpoint maintenance.
- Soft-Seat Design: Ensures tight shutoff and prevents leakage at low pressures.
- Bakeable Construction: Capable of withstanding high temperatures for chamber conditioning.
- Status Feedback: Provides real-time position data to the tool’s main controller for interlocks and logging.
Application Scenarios:
- High-Density Plasma Etching: Critical for processes sensitive to pressure variations.
- PECVD Processes: Controlling pressure to influence film density and refractive index.
- Vacuum System Isolation: Throttling the pump during process transitions.
- Abatement Flow Control: Regulating exhaust flow rates to match abatement system capacity.
