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Gasonics AWD-D-3-3-5 Pneumatic Diaphragm Valve
Introduction:
The Gasonics AWD-D-3-3-5 is a compact pneumatic diaphragm valve featuring a 3/8-inch port configuration. The “3-5” suffix often indicates a specific internal geometry or a high-flow variant designed to minimize pressure drop. It is a critical component for precise gas handling in high-purity environments.
Technical Specifications:
- Port Size: 3/8 inch VCR or Swagelok
- Body Material: 316L Stainless Steel
Detailed content
- Diaphragm Material: PTFE or PFA
- Actuation: Pneumatic (60-100 PSI)
- Flow Coefficient (Cv): Optimized for moderate to high flow rates
- Temperature Range: -20°C to +150°C (Standard)
- Vacuum Compatibility: Suitable for UHV applications
Functional Features:
- High Conductance: Internal porting is designed to maximize gas flow while maintaining diaphragm isolation.
- Bubble-Tight Shutoff: Ensures zero leakage when closed, critical for maintaining process gas purity.
- Low Particle Generation: Smooth internal finishes and soft diaphragm actuation minimize particle shedding.
- Manual Override: Includes a manual knob for emergency operation during pneumatic failure.
Application Scenarios:
- Carrier Gas Lines: Controlling high-flow carrier gases like Nitrogen or Argon.
- Calibration Gas Routing: Directing calibration gases to process sensors with high precision.
- Pilot Valve Operation: Acting as a pilot to control larger pneumatic actuators or valves.
- Load Lock Venting: Managing the flow of venting gas into load lock chambers.
