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Gasonics AWO-1-1 Optical Viewport

Introduction:
The Gasonics AWO-1-1 is the base or smallest configuration in the AWO viewport series. It provides a fundamental optical access port for vacuum chambers. This component is essential for basic visual inspection and simple optical sensor integration.

Technical Specifications:

  • Type: Vacuum Optical Window
  • Material: Borosilicate Glass or Fused Silica

Detailed content

  • Diameter/Size: Minimum standard size (e.g., 1 inch or 25mm)
  • Vacuum Compatibility: 1 x 10^-8 Torr
  • Seal: Elastomer (Viton) or Metal (Copper)
  • Operating Temp: -20°C to +150°C (Elastomer) / +450°C (Metal seal)

Functional Features:

  • Basic Optical Access: Provides a simple, cost-effective way to view the chamber interior.
  • Standardized Interface: Fits common flange patterns for easy retrofitting.
  • Replaceable Seal: Elastomer seals can be easily replaced during maintenance.
  • Visual Indicator: Allows quick “go/no-go” visual checks of plasma ignition.

Application Scenarios:

  • Routine Inspection: Standard viewports on load locks and transfer chambers.
  • Pilot Lights: Housing for chamber status lights.
  • Simple Sensors: Mounting point for basic photodiodes or fiber optics.
  • Educational/R&D Tools: Used in training equipment or research reactors.

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