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AMAT 0010-29958 Wafer Presence Sensor Assembly
Product Description: A non-contact optical sensor system designed for reliable detection of wafer presence in semiconductor handling equipment. It ensures accurate wafer detection without physical contact, preventing wafer damage and processing errors.
Technical Specifications:
- Sensing Principle: Reflective infrared optical
- Detection Range: 10–100mm
Detailed content
- Response Time: < 1ms
- Light Source: Infrared LED (880nm)
- Output: NPN/PNP configurable, 0–10V analog
- Supply Voltage: 24V DC ±10%
- Operating Temperature: 0–50°C
- Enclosure Rating: IP65
- Materials: 316L stainless steel housing, borosilicate glass lens
Functional Features:
- High-precision wafer detection for 200mm and 300mm wafers
- Immunity to ambient light interference
- Teach-in function for simplified setup and calibration
- Built-in diagnostics for sensor health monitoring
- Compact design for installation in tight spaces
- Shock and vibration resistance for robust operation
- Compatible with standard AMAT robot controllers
Application Scenarios:
- Wafer presence detection in load ports and cassettes
- Wafer transfer chamber entry/exit monitoring
- Pre-aligner wafer detection systems
- End-effector wafer presence verification
- Process chamber wafer positioning confirmation
