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AMAT 3500-01078 Wafer Handling Robot Arm Assembly
Product Description: A high-precision robotic arm designed for automated wafer handling in semiconductor manufacturing equipment. It transfers 200mm or 300mm wafers between load ports, cassettes, pre-aligners, and process chambers with exceptional accuracy and repeatability. The arm is engineered for cleanroom compatibility, low particle generation, and reliable operation in UHP vacuum environments.
Technical Specifications:
– Wafer Compatibility: 200mm and 300mm wafers (configurable)
– Reach: 500mm (maximum horizontal reach)
Detailed content
–Positioning Accuracy: ±0.02mm
– Repeatability: ±0.01mm
– Speed: 1.5 m/s (maximum linear speed)
– Motor Type: Servo motors (3-axis)
– End-Effector: Vacuum or electrostatic chuck (configurable)
– Operating Environment: Cleanroom (Class 1), UHP vacuum (1×10⁻⁹ Torr)
– Dimensions: 600mm × 400mm × 300mm
– Weight: 12 kg
– Compliance: SEMI S2, CE, ISO 14644-1
Functional Features:
– High-precision positioning for reliable wafer transfer without damage
– Low particle generation (Class 1 cleanroom compatible)
– Fast transfer speed to maximize equipment throughput
– Compatible with vacuum and atmospheric environments
– Built-in collision detection for equipment and wafer protection
– Easy calibration with AMAT robot calibration tools (e.g., AMAT 0270-20152)
– Seamless integration with AMAT Centura and Endura platforms
– Long service life with minimal maintenance
Application Scenarios:
– Wafer transfer between load ports and process chambers (200mm/300mm)
– Wafer handling in transfer chambers and load locks
– Pre-aligner to process chamber wafer transfer
– Automated material handling in semiconductor fabs
– Wafer inspection and metrology station transfer
