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AMAT 3700-02478 UHP Gas Filter Housing Assembly
Product Description: A rugged, leak-tight filter housing designed for ultra-high-purity gas filtration in semiconductor manufacturing. It houses disposable filter elements to remove sub-micron particulates and contaminants from process gases, ensuring gas purity meets the strict requirements of advanced semiconductor processes. The housing is engineered for UHP compatibility, easy filter replacement, and long-term reliability in harsh fab environments.
Technical Specifications:
– Material: 316L electropolished stainless steel
– Filter Compatibility: 0.003μm to 1μm absolute PTFE or ceramic filter elements
Detailed content
–Flow Rate: 150 slm (standard liters per minute)
– Maximum Pressure: 300 PSIG
– Operating Temperature: -40°C to +120°C
– Connection Type: 1/2-inch VCR face-seal fittings (inlet and outlet)
– Leak Rate: < 1×10⁻⁹ atm·cc/s He
– Dimensions: 120mm (length) × 80mm (diameter)
– Weight: 2.3 kg
– Compliance: SEMI C12, RoHS, CE
Functional Features:
– UHP design with electropolished surfaces to minimize outgassing and particle generation
– Quick-release clamp for easy filter element replacement without system shutdown
– High flow capacity with minimal pressure drop
– Compatibility with a wide range of filter elements (PTFE, ceramic) for different filtration needs
– Rugged construction for resistance to pressure and thermal cycling
– Sealed design prevents gas leakage and contamination during filter replacement
– Pressure gauge port for monitoring filter differential pressure (optional)
Application Scenarios:
– UHP gas filtration for CVD, ALD, and etch process chambers
– Bulk gas distribution system filtration
– Specialty gas filtration for precursor gases
– Gas panel filtration for multi-gas process recipes
– Load lock and transfer chamber purge gas filtration
