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AMAT 0090-77041 RF Match Network Tuning Motor Assembly
Product Description: A precision stepper motor assembly designed for automatic tuning of RF match networks in plasma processing equipment. It provides precise, repeatable adjustment of match network components for optimal RF power transfer.
Technical Specifications:
- Motor Type: Bipolar stepper motor (1.8° step angle)
- Holding Torque: 1.2 N·m
- Step Resolution: 0.001° (microstepping)
Detailed content
- Voltage: 24V DC
- Current: 2A per phase
- Positioning Accuracy: ±0.05°
- Repeatability: ±0.02°
- Operating Temperature: 0–50°C
- Enclosure Rating: IP54
- Weight: 0.8 kg
Functional Features:
- Microstepping capability for ultra-precise tuning adjustments
- High torque for reliable operation under load
- Built-in position feedback for closed-loop control
- Low vibration and noise for stable process conditions
- Corrosion-resistant construction for harsh environments
- Compatible with AMAT RF match network controllers
- Long service life with minimal maintenance
Application Scenarios:
- RF match network tuning in PECVD chambers
- Reactive ion etching (RIE) system impedance matching
- PVD sputtering process RF tuning
- Plasma stripping and ashing equipment
- Ion implantation source matching networks
