Digital guide
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AMAT 0020-30723
- Product Name: Cylinder, Clamping Aluminum 200mm Notch
- Product Description: A precision-machined aluminum clamping cylinder designed for securing wafer components in 200mm semiconductor processing equipment.
- Technical Specifications:
- Material: High-strength aluminum alloy 7075-T6
Detailed content
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- Compatibility: Designed specifically for 200mm wafer systems with notch orientation
- Surface Treatment: Hard anodized coating for wear resistance
- Operating Pressure: Vacuum-compatible to 1×10⁻⁹ Torr
- Functional Features:
- Provides secure clamping without wafer damage
- Precision notch alignment ensures proper wafer orientation
- Excellent thermal conductivity for uniform temperature distribution
- Lightweight design reduces mechanical stress on drive systems
- Non-magnetic properties prevent interference with process electronics
- Application Scenarios:
- Used in AMAT Endura 2 PVD chambers
- Applied in physical vapor deposition processes
- Deployed in metal sputtering applications
- Utilized in wafer handling and clamping subsystems
- Suitable for high-vacuum semiconductor manufacturing environments
