Digital guide
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Detailed content
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- Dimensions: Precision-machined to OEM specifications for 200mm wafer systems
- Dielectric Strength: Exceeds 25kV/mm
- Temperature Resistance: Up to 450°C continuous
- Functional Features:
- Provides superior electrical isolation to prevent arcing and short circuits
- Excellent thermal stability and resistance to thermal shock
- High chemical inertness against process gases (e.g., fluorine, chlorine plasmas)
- Precision tolerances ensure perfect fit and alignment
- Application Scenarios:
- Primarily used in AMAT Endura PVD chambers
- Applied in DC bias subsystems for wafer electrostatic chucks (ESC)
- Deployed in semiconductor fabrication for 200mm wafer processing
