Digital guide
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AMAT 0190-48891
- Product Name: Double-Filament Hot Cathode Ion Gauge
- Product Description: A high-reliability hot cathode ionization gauge for precise measurement of high and ultra-high vacuum (UHV) pressures.
- Technical Specifications:
- Measurement Range: 1 x 10⁻¹⁰ Torr to 1 x 10⁻³ Torr.
Detailed content
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- Filaments: Dual tungsten-rhenium (W-Re) filaments.
- Output: Analog 0-10V DC and digital RS-485.
- Sensor: Bayard-Alpert type nude gauge.
- Mounting: 2.75″ CF (ConFlat) flange.
- Operating Temperature: 0°C to 50°C.
- Functional Features:
- Automatic filament switchover upon failure for uninterrupted operation.
- High sensitivity and stability for precise vacuum control.
- Built-in filament over-current and over-temperature protection.
- Fast response to pressure changes.
- Hermetically sealed for long-term stability in UHV.
- Application Scenarios: Used for vacuum monitoring in process chambers, turbo pump forelines, and load locks on all major semiconductor manufacturing platforms.
