Digital guide

You are here:

AMAT 0020-21885

Product Name: DC Bias Isolator Assembly

Product Description: High-performance electrical isolator for DC bias applications in semiconductor chambers.

Technical Specifications:

  • Type: DC BIOS (DC Bias Isolator)
  • Material: High-performance ceramic composite

Detailed content

  • High dielectric strength for electrical isolation
  • Precision machined for exact component fit
  • Designed for high-voltage DC bias applications

    Functional Features:

  • Provides complete electrical isolation while enabling DC bias transmission
  • Prevents ground loops and electrical interference
  • Withstands high voltages and thermal stress
  • Low outgassing properties suitable for vacuum environments
  • High reliability in continuous semiconductor process operation

    Application Scenarios:

  • Semiconductor process chambers requiring DC bias application
  • PVD and CVD equipment with electrostatic chuck systems
  • Plasma process tools requiring electrical isolation
  • Semiconductor manufacturing equipment for advanced wafer processing

You may also like