Digital guide
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AMAT 0041-96739
Product Name: SMD / SRP Shield Ring Assembly
Product Description: Precision shield ring component for Producer GT series process chambers.
Technical Specifications:
- Material: High-grade stainless steel or aluminum alloy
- Precision laser-cut and machined for exact chamber fit
Detailed content
- Surface passivation for corrosion resistance
- Designed for SMD (Sputtered Metal Deposition) and SRP processes
Functional Features:
- Confines plasma within process region for consistent deposition
- Prevents cross-contamination between process cycles
- Optimizes gas flow dynamics for uniform thin-film growth
- Easy installation and replacement during chamber maintenance
Application Scenarios:
- Producer GT series semiconductor deposition systems
- SMD and SRP chamber thin-film deposition processes
- Advanced semiconductor manufacturing for 300mm wafer production
