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AMAT 0010-10901
Product Name: 300mm Endura Volta HD+ PVD Chamber Component Kit (Collimator/Shield)
Product Introduction: This kit is a major maintenance hardware set for the Applied Materials Endura Volta HD+ PVD system. It is designed to refresh the internal chamber environment to “like-new” condition. The Volta HD+ is a high-density plasma source used for filling small features with copper. The kit typically includes the collimator, chamber liners, and various shields that have been eroded by the intense plasma bombardment over thousands of wafers.
Technical Specifications:
- System Compatibility: Endura Volta HD+ (300mm)
Detailed content
- Components: Collimator assembly, chamber sidewall liner, bottom shield, target faceplate
- Material: High-purity Aluminum, Stainless Steel 316L, Titanium
- Critical Dimensions: Tight tolerances on collimator hole alignment and spacing
Functional Features: - High-Density Plasma Handling: Specifically engineered to withstand the extreme ion flux and heat loads generated by the Volta HD+ source.
- Uniformity Restoration: Replacing worn shields restores the original gas flow and plasma distribution, correcting any drift in film thickness uniformity.
- Reduced Arcing: New, smooth surfaces with proper anodization reduce the likelihood of micro-arcing, which can cause electrical damage to devices.
- Quick Swap: Designed for rapid removal and installation using dedicated tooling to minimize tool downtime (Match Time).
Application Scenarios: - Copper metallization for 7nm, 5nm, and 3nm process nodes.
- Refurbishment of PVD chambers after extensive run time.
- Processes involving high-power sputtering (>10kW) where component erosion is rapid.
- Ensuring consistent film stress and grain structure for advanced interconnects.
