Digital guide
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AMAT 0050-35797
Product Name: Stainless Steel Gas Line Weldment / Tubing Assembly
Product Description: A precision-fabricated stainless steel tubing assembly for the delivery of ultra-high purity (UHP) process gases in semiconductor manufacturing.
Technical Specifications:
- Material: 316L electropolished stainless steel tubing.
Detailed content
- Finish: Internal surface electropolished for low particle adhesion and cleanability.
- Configuration: Custom-bent and welded assembly with fixed end fittings.
- Cleanliness: Pre-cleaned and vacuum-bagged for UHP gas service.
- Compliance: Meets SEMI standards for gas delivery components.
Functional Features:
- Leak-tight, all-welded construction for zero gas loss in hazardous environments.
- Smooth, crevice-free internal bore minimizes pressure drop and particle entrapment.
- High corrosion resistance to aggressive process gases (e.g., Cl₂, BCl₃, WF₆).
- Precisely engineered for exact fit, eliminating installation errors.
Application Scenarios:
- Transports specialty gases from gas boxes to process chambers (CVD, Etch, ALD).
- Used in gas distribution panels and exhaust lines across all major AMAT platforms.
