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AMAT 0020-23029
Product Name: Precision Machined Insulator / Spacer
Product Description: A high-performance engineered component used for physical spacing, electrical insulation, or mechanical support within semiconductor process modules.
Technical Specifications:
- Material: Advanced technical ceramic (Alumina) or high-performance polymer (e.g., Vespel).
Detailed content
- Tolerances: Machined to ultra-precise dimensional tolerances (±0.001 mm).
- Surface Finish: Super-finished to minimize particulate contamination.
- Mechanical Strength: High compressive strength to resist chamber pressure and loading.
Functional Features:
- Provides stable, non-conductive spacing in high-voltage environments.
- Inert to process chemicals, ensuring no contamination or degradation.
- Low outgassing compliant with UHV standards.
- Custom-machined profiles for exact fit and function in specific assemblies.
Application Scenarios:
- Used as standoffs, washers, or alignment pins in PVD, CVD, and Etch chambers.
- Provides insulation and alignment for gas distribution assemblies and lift mechanisms.
