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AMAT 0090-A0693
Product Name: PMT-100 Photomultiplier Tube Detector Assembly
Product Description: A high-sensitivity optical detection module designed for process endpoint detection in semiconductor manufacturing equipment.
Technical Specifications:
- Detector Type: Photomultiplier tube (PMT)
Detailed content
- Spectral Response: 185-900 nm wavelength range
- Gain: 10⁶ – 10⁷ adjustable gain range
- Supply Voltage: -1000V to -2000V adjustable
- Output: Analog current signal (nA range)
- Dimensions: Compact module form factor
- Operating Temperature: 0°C to +50°C
Functional Features:
- Ultra-high sensitivity for low-light level detection
- Wide dynamic range for varying signal intensities
- Fast response time for real-time process monitoring
- Integrated high-voltage power supply
- Temperature compensation for stable performance
- Shielded construction for electromagnetic interference protection
Application Scenarios:
- Plasma etch endpoint detection
- Thin film deposition process monitoring
- Wafer cleaning process verification
- Optical emission spectroscopy (OES) systems
- Process chamber condition monitoring
