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AMAT 0200-35296
Product Name: Inner Gas Feed Plug Assembly
Product Description: A precision-engineered component for delivering process gases directly into semiconductor processing chambers. It ensures uniform gas distribution and maintains vacuum integrity.
Technical Specifications:
- Material: High-purity 316L stainless steel
Detailed content
- Connection Type: VCR fitting
- Gas Compatibility: All semiconductor process gases
- Leak Rate: <1×10⁻⁹ atm-cc/sec He
- Temperature Range: -40°C to +150°C
- Dimensions: Precision machined for specific chamber models
Functional Features:
- Precise gas flow control
- Uniform gas distribution
- Excellent vacuum sealing
- Corrosion resistance to process gases
- Easy installation and removal
- Compatibility with high-purity applications
Application Scenarios:
- Deposition process gas delivery
- Etch chamber gas injection
- Plasma cleaning systems
- Chemical vapor distribution
- AMAT DPS and P6 chamber systems
