Digital guide
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AMAT 0020-24411
Product Name: Ceramic Insulator Spacer Assembly
Product Description: A precision ceramic component providing electrical isolation and precise spacing between components in semiconductor vacuum chambers. It maintains proper alignment while preventing electrical arcing.
Technical Specifications:
- Material: High-purity macor ceramic
Detailed content
- Dielectric Strength: >15 kV/mm
- Temperature Resistance: Up to 800°C
- Dimensional Tolerance: ±0.01 mm
- Surface Finish: Ra < 0.5 μm
- Mounting: Press-fit or bolt-on installation
Functional Features:
- Excellent electrical insulation
- High mechanical strength
- Chemical inertness to process environments
- Low outgassing for vacuum compatibility
- Precise dimensional stability
- Non-contaminating material
Application Scenarios:
- Electrode support structures
- Wafer chuck isolation
- Gas distribution plate mounting
- Vacuum feedthrough spacing
- RF component isolation
