Digital guide
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AMAT 0021-09914
Product Name: Blocker Plate Assembly
Product Description: A precision-engineered metal component used to control gas flow and plasma distribution within semiconductor deposition and etch chambers. It optimizes process uniformity and protects critical chamber components.
Technical Specifications:
- Material: High-grade aluminum or stainless steel
Detailed content
- Surface Coating: Anodized or passivated for corrosion resistance
- Thickness: Precision machined to OEM specifications
- Mounting: Bolt-on installation with alignment pins
- Compatibility: Designed for specific AMAT chamber models
Functional Features:
- Precise gas flow regulation
- Uniform plasma distribution across wafer surface
- Protection of chamber components from process byproducts
- Easy cleaning and replacement
- Enhanced process repeatability
- Minimized particle generation
Application Scenarios:
- SACVD and PECVD chambers
- Etch process gas distribution
- Giga-Fill deposition systems
- Wafer processing uniformity control
- Chamber component protection
