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AMAT 0040-47677
Product Name: Chamber Bellows Assembly
Product Description: A flexible, vacuum-tight component enabling linear movement within semiconductor processing chambers while maintaining pressure integrity. It accommodates lift pins, gas lines, and other moving components.
Technical Specifications:
- Material: 316L stainless steel
Detailed content
- Stroke Length: Custom designed for specific applications
- Leak Rate: <1×10⁻⁹ atm-cc/sec He
- Pressure Rating: Full vacuum to 15 PSI
- Temperature Range: -20°C to +200°C
- Mounting: Flanged connections with VCR fittings
Functional Features:
- Excellent flexibility and fatigue resistance
- Zero leakage under vacuum conditions
- Corrosion resistance to process gases
- Long service life with minimal maintenance
- Compatibility with UHV environments
- Easy installation and replacement
Application Scenarios:
- Wafer lift pin assemblies
- Gas feedthrough systems
- Vacuum chamber access doors
- Process monitoring probe installations
- AMAT etch and deposition chambers
